ELECTRICAL PROPERTIES OF Al DOPED CeO<sub>2</sub> THIN FILMS DEPOSITED BY O<sub>2</sub> INTRODUCED Ar SPUTTERING

NOTANI Y.; OKAZAKI T.; HARA K.; OSAWA T.; HIBINO K.; SUZUKI S.; ISHIBASHI K.; YAMAMOTO Y.

Art

J-GLOBAL ID：201402240688083551 Reference number：14A0426435

ELECTRICAL PROPERTIES OF Al DOPED CeO₂ THIN FILMS DEPOSITED BY O₂ INTRODUCED Ar SPUTTERING

酸素導入Arスパッタリングにより堆積したAlドープCeO₂薄膜の電気的性質

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Material：
Issue： 32 Page： 52-57 Publication year： Mar. 2014
JST Material Number： L0263A ISSN： 0914-2908 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Electric conduction in other inorganic compounds , Oxide thin films

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ELECTRICAL PROPERTIES OF Al DOPED CeO2 THIN FILMS DEPOSITED BY O2 INTRODUCED Ar SPUTTERING

ELECTRICAL PROPERTIES OF Al DOPED CeO₂ THIN FILMS DEPOSITED BY O₂ INTRODUCED Ar SPUTTERING