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J-GLOBAL ID:201502220763079970   Reference number:15A0847112

ALD-Al2O3に埋め込まれた多結晶シリコンナノワイヤーの光音響分光による研究=シリコンをナノワイヤー化したときの光音響特性の変化=

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Volume: 27  Issue:Page: 61-65  Publication year: Aug. 01, 2015 
JST Material Number: L2344A  ISSN: 0916-2410  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices 

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