Art

J-GLOBAL ID：201502228055774560   Reference number：15A0540627

Size-reduced two-dimensional integrated magnetic sensor fabricated in 0.18-μm CMOS process

0.18μm CMOSプロセスで製作されたサイズ縮小二次元集積磁気センサ

Author (3)： KIMURA Takayuki (Dep. of Electrical and Electronic Engineering, Coll. of Engineering, Ibaraki Univ., 4-12-1, Nakanarusawa, Hitachi ...) ,  UNO Kazuya ,  MASUZAWA Toru
Material： IEEJ Transactions on Electrical and Electronic Engineering  (IEEJ Trans Electr Electron Eng)
Volume： 10  Issue： 3  Page： 345-349  Publication year： May. 2015 
JST Material Number： W1854A  ISSN： 1931-4973  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *sensor ,  *magnetic sensor ,  semiconductor process ,  sizing (paper) ,  scale down ,  two dimension ,  semiconductor integrated circuit ,  motor ,  magnetic levitation ,  *Hall device ,  *Hall sensor
Semi thesaurus term： CMOS process ,  size reduction

JST classification (2)： Magnetoelectric devices  (NC03100X) ,  Measuring methods and instruments of magnetism  (AD07060U)

Reference (8)：

• Kimura T, Takasaki K, Masuzawa T. Characteristics of a two-dimensional integrated magnetic sensor for position sensing and motor control, IEEJ Transaction on Electrical and Electronic Engineering 2006; 1:188-193.
• Kimura T, Yokoyama Y, Masuzawa T. Frame rate improvement for two-dimensional integrated magnetic sensor. ITE Journal 2010; 64:416-418 (in Japanese).
• Kimura T, Furuya H, Masuzawa T. Investigation of sensitivity of two-dimensional integrated magnetic sensor fabricated in sub-micron CMOS process. ITE Journal 2011; 65:364-366 (in Japanese).
• Kimura T, Uno K, Murofushi W, Masuzawa T. Investigation on the characteristics of magnetic sensor sensitivity in high-frame-rate sensing. International Conference on Electrical Engineering 2012, 2012; P-FS2-23.
• Gallagher RV Corak WS. A metal-oxide-semiconductor (MOS) HALL element. Solid-State Electronics 1966; 9:571-580.

Terms in the title (5)： CMOSプロセス ,  製作 ,  サイズ縮小 ,  集積 ,  磁気センサ