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J-GLOBAL ID:201602240187772719   Reference number:16A1280787

圧電体MEMSダイアフラム型超音波センサの上部電極が振動モードに与える影響

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Volume: 33rd  Page: ROMBUNNO.26am1-B-2  Publication year: 2016 
JST Material Number: X0768B  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Piezoelectric devices 

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