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J-GLOBAL ID：201602245506890188   Reference number：16A0896434

Short-pulse excitation of microwave plasma for efficient diamond growth

効率的なダイヤモンドの成長のためのマイクロ波プラズマの短パルス励起
Author (3)：
Yamada Hideaki

About Yamada Hideaki

(Advanced Power Electronics Research Center (ADPERC), National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan)

About Advanced Power Electronics Research Center (ADPERC), National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan

, 
Chayahara Akiyoshi

About Chayahara Akiyoshi

(Advanced Power Electronics Research Center (ADPERC), National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan)

About Advanced Power Electronics Research Center (ADPERC), National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan

, 
Mokuno Yoshiaki

About Mokuno Yoshiaki

(Advanced Power Electronics Research Center (ADPERC), National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan)

About Advanced Power Electronics Research Center (ADPERC), National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 109  Issue： 9  Page： 092102-092102-5  Publication year： Aug. 29, 2016 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Abstract/Point：
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*diamond

About diamond

, 
*plasma CVD

About plasma CVD

, 
plasma

About plasma

, 
pulse modulation

About pulse modulation

, 
microwave

About microwave

, 
single crystal

About single crystal

, 
crystal growth

About crystal growth


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
microwave plasma

About microwave plasma


JST classification (1)：
JST classification
Category name(code) classified by JST.
Crystal growth of semiconductors 
(BK13040X)

About Crystal growth of semiconductors

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
ダイヤモンド

About ダイヤモンド

, 
成長

About 成長

, 
マイクロ波プラズマ

About マイクロ波プラズマ

, 
パルス

About パルス

, 
励起

About 励起


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