Art
J-GLOBAL ID：201602264920334411   Reference number：16A0800262

Development of Low-Vacuum SIMS Instruments with Large Cluster Ion Beam

大クラスタイオンビームによる低真空SIMS装置の開発
Author (8)：
SUZUKI K.

About SUZUKI K.

(Kyoto Univ.)

About Kyoto Univ.

, 
KUSAKARI M.

About KUSAKARI M.

(Kyoto Univ.)

About Kyoto Univ.

, 
SEKI T.

About SEKI T.

(Kyoto Univ.)

About Kyoto Univ.

, 
SEKI T.

About SEKI T.

(Japan Sci. and Technol. Agency (JST))

About Japan Sci. and Technol. Agency (JST)

, 
AOKI T.

About AOKI T.

(Kyoto Univ.)

About Kyoto Univ.

, 
AOKI T.

About AOKI T.

(Japan Sci. and Technol. Agency (JST))

About Japan Sci. and Technol. Agency (JST)

, 
MATSUO J.

About MATSUO J.

(Kyoto Univ.)

About Kyoto Univ.

, 
MATSUO J.

About MATSUO J.

(Japan Sci. and Technol. Agency (JST))

About Japan Sci. and Technol. Agency (JST)


Material：
Annual Report of Quantum Science and Engineering Center  (Annu Rep Quantum Sci Eng Cent)

About Annual Report of Quantum Science and Engineering Center


Volume： 18  Page： 26-29  Publication year： Jul. 2016 
JST Material Number： L6689A  ISSN： 1345-0700  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*ion beam

About ion beam

, 
cluster ion

About cluster ion

, 
*Vacuum

About Vacuum

, 
*secondary ion mass spectrometry

About secondary ion mass spectrometry

, 
sputtering

About sputtering

, 
optical microscopy

About optical microscopy

, 
*Cluster ion beam

About Cluster ion beam


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*低真空

About 低真空

, 
optical microscopic observation

About optical microscopic observation


JST classification (1)：
JST classification
Category name(code) classified by JST.
Mass spectrometers 
(BD02060M)

About Mass spectrometers

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
クラスタイオンビーム

About クラスタイオンビーム

, 
真空

About 真空

, 
SIMS

About SIMS

, 
開発

About 開発


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