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J-GLOBAL ID:201602282251228202   Reference number:16A0941568

高圧水蒸気処理による高誘電体膜SrTa2O6を用いたIGZO薄膜トランジスタの特性改善

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Volume: 77th  Page: ROMBUNNO.15p-A22-6  Publication year: Sep. 01, 2016 
JST Material Number: Y0055B  ISSN: 2758-4704  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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