About NUMAZAWA Satoshi
About Samsung R&D Inst. Japan, Yokohama, JPN
About MACHIDA Ken
About Samsung R&D Inst. Japan, Yokohama, JPN
About ISOBE Michiro
About Osaka Univ., Suita, JPN
About HAMAGUCHI Satoshi
About Osaka Univ., Suita, JPN
About Proceedings of International Symposium on Dry Process
About silicon
About silicon dioxide
About silicon nitride
About intramolecular dynamics
About fluorine
About radical
About adsorption
About multilayer film
About simulation
About RIE
About Applications of plasma
About Si
About SiO2
About Si3N4
About エッチングプロセス
About フッ素
About ラジカル
About 多層
About 吸着
About 分子力学
About 研究