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J-GLOBAL ID：201702246436145499   Reference number：17A0055061

Manufacturability-aware mask assignment in multiple patterning lithography

多重パターニング技術における製造可能性を意識したマスク帰属【Powered by NICT】

Author (6)： Kohira Yukihide (The University of Aizu, Aizu-Wakamatsu, Japan) ,  Takahashi Atsushi (Tokyo Institute of Technology, Tokyo, Japan) ,  Matsui Tomomi (Tokyo Institute of Technology, Tokyo, Japan) ,  Kodama Chikaaki (Toshiba Corporation, Storage & Electronic Devices Solutions Company, Yokohama, Japan) ,  Nojima Shigeki (Toshiba Corporation, Storage & Electronic Devices Solutions Company, Yokohama, Japan) ,  Tanaka Satoshi (Toshiba Corporation, Storage & Electronic Devices Solutions Company, Yokohama, Japan)
Material： IEEE Conference Proceedings  (IEEE Conf Proc)
Volume： 2016  Issue： APCCAS  Page： 538-541  Publication year： 2016 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： Due to the progress of the pro...

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Thesaurus term： *pattern formation ,  LSI ,  *multiplex ,  *manufacturability

JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (5)： 多重 ,  パターニング ,  製造可能性 ,  意識 ,  マスク