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J-GLOBAL ID:201702247292728239   Reference number:17A0550022

ドライ酸化,窒化,POCl3処理Si面SiC-MOS界面の電子スピン共鳴分光

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Volume: 64th  Page: ROMBUNNO.16a-P5-13  Publication year: Mar. 01, 2017 
JST Material Number: Y0054B  ISSN: 2436-7613  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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