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J-GLOBAL ID：201702252406991392   Reference number：17A1458529

Hysteresis in volume fraction of clusters incorporated into a-Si:H films deposited by SiH₄ plasma chemical vapor deposition

a-に取込まれたクラスタの体積分率におけるヒステリシス:SiH_4プラズマ化学蒸着により堆積した【Powered by NICT】

Author (8)： Toko Susumu (Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan) ,  Torigoe Yoshihiro (Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan) ,  Keya Kimitaka (Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan) ,  Kojima Takashi (Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan) ,  Seo Hyunwoong (Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan) ,  Itagaki Naho (Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan) ,  Koga Kazunori (Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan) ,  Shiratani Masaharu (Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan)
Material： Surface & Coatings Technology  (Surf Coat Technol)
Volume： 326  Issue： PB  Page： 388-394  Publication year： 2017 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： Suppressing cluster incorporat...

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Thesaurus term： *hysteresis ,  amorphous silicon ,  solar cell ,  *plasma CVD ,  *cluster ,  radical ,  rate of sedimentation ,  *volume fraction ,  *plasma ,  hydrogenation
Semi thesaurus term： 発光強度 ,  蒸着速度 ,  放電電力 ,  a-Si:H ,  放電プラズマ , 【Automatic Indexing@JST】

Author keywords (6)： Hysteresis ,  Cluster ,  Light-induced degradation ,  Amorphous Si ,  Plasma CVD ,  Solar cell

JST classification (1)： Thin films of other inorganic compounds  (BK14060A)

Terms in the title (5)： クラスタ ,  体積分率 ,  ヒステリシス ,  プラズマ化学蒸着 ,  堆積