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J-GLOBAL ID：201702256185983281   Reference number：17A1358217

Microfabrication of hybrid structure composed of rigid silicon and flexible polyimide membranes

硬質けい素とフレキシブルポリイミド膜から成るハイブリッド構造の微細加工【Powered by NICT】

Author (6)： Murakami Sunao (Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan) ,  Ishihara Daisuke (Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan) ,  Araki Masateru (Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan) ,  Horie Tomoyoshi (Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan) ,  Ohira Naoto (Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan) ,  Ito Takahiro (Department of Mechanical Information Science and Technology, Faculty of Computer Science and Systems Engineering, Kyushu Institute of Technology (Kyutech), Iizuka, Fukuoka, Japan)
Material： IEEE Conference Proceedings  (IEEE Conf Proc)
Volume： 2017  Issue： NEMS  Page： 840-843  Publication year： 2017 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： We have designed and microfabr...

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Thesaurus term： *mixed construction ,  bending test (bending) ,  *fine patterning ,  RIE ,  flapping ,  rigidity ,  photolithography ,  wing profile ,  *silicon ,  flexibility ,  thin film ,  micro structure ,  micro pattern ,  photosensitivity ,  mechanical property
Semi thesaurus term： ミクロ構造 , 【Automatic Indexing@JST】

JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (5)： 硬質 ,  けい素 ,  ポリイミド膜 ,  ハイブリッド構造 ,  微細加工