Art

J-GLOBAL ID：201702273344482706   Reference number：17A1381682

High-accuracy three-dimensional aspheric mirror measurement with nanoprofiler based on normal vector tracing method

法線ベクトル追跡法に基づくnanoprofilerによる高精度三次元非球面ミラー測定【Powered by NICT】

Author (7)： Kudo Ryota (Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan) ,  Kitayama Takao (Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan) ,  Tokuta Yusuke (Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan) ,  Shiraji Hiroki (Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan) ,  Nakano Motohiro (Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan) ,  Yamamura Kazuya (Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan) ,  Endo Katsuyoshi (Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan)
Material： Optics and Lasers in Engineering  (Opt Lasers Eng)
Volume： 98  Page： 159-162  Publication year： 2017 
JST Material Number： A0602B  ISSN： 0143-8166  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Abstract/Point： The demand for high-accuracy a...

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Thesaurus term： systematic error ,  aspherical mirror ,  aspherical lens ,  reproducibility ,  *three dimension ,  optical element ,  aspherical optics ,  Fizeau interferometer ,  surface profile ,  *aspheric surface ,  *high accuracy ,  *normal vector

Author keywords (5)： Aspheric optics ,  Free-form optics ,  High-precision surface measurement ,  Non-contact measurement ,  Normal vector tracing

JST classification (1)： Interferometry and interferometers  (BD07070G)

Terms in the title (4)： 法線ベクトル ,  追跡 ,  非球面 ,  ミラー