Art
J-GLOBAL ID:201702283609873432   Reference number:17A1003291

Blue-laser scanned imaging system using positioning marks formed on an optical disk substrate

光ディスク基板上に形成した位置決めマークを用いた青色レーザ走査型撮像システム
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Material:
Volume: 56  Issue:Page: 058003.1-058003.3  Publication year: May. 2017 
JST Material Number: G0520B  ISSN: 0021-4922  CODEN: JJAPB6  Document type: Article
Article type: 短報  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Optical instruments and techniques in general 
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