Rchr
J-GLOBAL ID：201801014035679544   Update date: Apr. 03, 2024

MICHIHATA Masaki

ミチハタ マサキ | MICHIHATA Masaki
Affiliation and department：
The University of Tokyo Research Center for Advanced Science and Technology

About The University of Tokyo Research Center for Advanced Science and Technology


Job title： Assistant Professor
Homepage URL  (1)： https://sites.google.com/view/masakimichihata/
Research field  (1)： Manufacturing and production engineering
Research keywords  (6)： Metrology based on optical resonances ,  長さ計測 ,  オンマシン計測 ,  インプロセス計測 ,  幾何形状計測 ,  超精密計測
Research theme for competitive and other funds  (24)：
  • 2023 - 2026 3次元空間座標基準モニタリングによる内面構造のナノスケール精度計測
  • 2022 - 2025 次世代機能デバイス実現のための高品位・超高アスペクト比微細穴加工システムの開発
  • 2022 - 2024 破壊的干渉照明を用いた次世代極細光ファイバ直径のナノ精度計測原理の確立
  • 2021 - 2023 1nm表面異物欠陥の自律探索を実現する動的位相差検出型・近接場液相プローブ計測法
  • 2020 - 2023 質量標準トレーサビリティ体系のための超高精度・広範囲なシリコン球体計測
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Papers (66)：
  • Masaki Michihata, Shotaro Kadoya, Satoru Takahashi. Diameter Measurement for Micro-Spheres via Coherent Scanning Interferometry with Reference to Gauge Block. International Journal of Automation Technology. 2024. 18. 1. 11-17
  • Hiromasa Kume, Masaki Michihata, Satoru Takahashi. Theoretical analysis on coherent optical super-resolution method for inspection of functional micro-structured surfaces with complex-amplitude-response distribution. Precision Engineering. 2023. 80. 138-159
  • Shusei Masuda, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi. Novel absolute length measurement method for etalon sensor using optical comb pulsed interference and harmonic etalon reflections. Measurement Science and Technology. 2023. 34. 5. 055205-055205
  • Yizhao Guan, Shuzo Masui, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi. Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: highly sensitive observation system using phase-contrast microscopy with a spatial light modulator. Journal of Physics: Conference Series. 2022. 2368. 1. 012014-012014
  • Yushen Liu, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi. Measurement properties of electric field intensity distribution of whispering gallery mode with near-field optical probe. Measurement Science and Technology. 2022. 33. 9. 095501
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MISC (82)：
  • Shuzo Masui, Wakana Endo, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi. Optical adhesion of photocurable emulsion droplets using laser trapping. Proceedings of SPIE - The International Society for Optical Engineering. 2021. 11798
  • Sojiro Murakami, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi. Simulation study on diameter measurement technique for submicrometer-sized tapered fibers with standing wave illumination. Proceedings of SPIE - The International Society for Optical Engineering. 2021. 11927
  • Yizhao Guan, Masahiro Kume, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi. The FDTD analysis for diffraction limited microgroove structure with standing wave illumination for the realization of coherent structured illumination microscopy. Proceedings of SPIE - The International Society for Optical Engineering. 2021. 11927
  • Yushen Liu, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi. Manufacturing of glass probe for measuring the surface light intensity distribution of spherical WGM resonance. 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021. 2021. 387-390
  • Tatsuya Kume, Hiromasa Yasuda, Tsutomu Mibe, Masaki Michihata, Satoru Takahashi. Evaluation of the Free Spectral Range of an Etalon by Referring an Optical Frequency Comb. 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021. 2021. 677-680
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Patents (8)：
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Books (2)：
  • Bilingual edition 精密計測学 Precision Metrology
    朝倉書店 2024 ISBN:4254201788
  • Optical micro-CMM, Metrology (Precision Manufacturing series)
    Springer 2019
Lectures and oral presentations  (135)：
  • High-precision measurement of dielectric microsphere diameter using whispering gallery mode resonance
    (Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 2017)
  • Characteristic analysis of phase contrast microscopy in liquid probe type surface inspection method
    (Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 2017)
  • Highly sensitive back-focal-plane interferometry for tracking nanoparticle position
    (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings 2017)
  • サブ回折限界微小開口の非破壊光学式深さ計測法(第三報)
    (精密工学会学術講演会講演論文集 2017)
  • エバネッセント露光型ナノ光造形法に関する研究(第27報)
    (精密工学会学術講演会講演論文集 2017)
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Education (6)：
  • 2007 - 2010 Osaka University Graduate School of Engineering Division of Mechanical Engineering
  • 2004 - 2007 大阪大学大学院 工学研究科 機械システム工学専攻 修士課程
  • 2005 - 2005 Delft University of Technology (TU Delft) 交換留学
  • 2004 - 2005 Technical University of Denmark (DTU) 交換留学
  • 2002 - 2004 Osaka University School of Engineering Department of Mechanical, Materials and Manufacturing Science
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Professional career (1)：
  • PhD (Eng.)
Work history (5)：
  • 2019/04 - 現在 東京大学 工学系研究科 精密工学専攻 准教授
  • 2015/04 - 2019/03 The University of Tokyo Research Center for Advanced Science and Technology
  • 2010/04 - 2015/03 Osaka University Graduate School of Engineering, Division of Mechanical Engineering
  • 2013/10 - 2014/01 National Physical Laboratory (NPL), Guest worker
  • 2008/04 - 2010/03 日本学術振興会 特別研究員(DC2)
Committee career (25)：
  • 2024/04 - 現在 精密工学会 学術交流委員
  • 2024/04 - 現在 精密工学会 会誌編集委員
  • 2023/04 - 現在 The Japan Society for Abrasive Technology Review Committee
  • 2022/04 - 現在 精密工学会 校閲委員会分野幹事
  • 2020/04 - 現在 将来技術研究会(ATOM) 幹事
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Awards (28)：
  • 2022/01 - Nanomanufacutring and metrology Excellent article award: Surface imaging technique by an optically trapped microsphere in air condition
  • 2020/08 - 里見奨学会 里見賞 光共振モード解析に基づく超高精度球体計測原理の確立
  • 2019/09 - 精密工学会 メカノフォトニクス専門委員会 吉澤論文賞 Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale
  • 2019/09 - ISMTII 2019 Young Researcher Award In-process measurement technique of micro-fiber diameter with interfered scattering pattern of two beam irradiation
  • 2019/03 - Japan Society for Precision Engineering JSPE Best Paper Award One-shot stereolithography for biomimetic micro hemisphere covered with relief structure
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Association Membership(s) (3)：
応用物理学会 ,  THE JAPAN SOCIETY OF MECHANICAL ENGINEERS ,  THE JAPAN SOCIETY FOR PRECISION ENGINEERING
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