Rchr
J-GLOBAL ID：201801014035679544
Update date: Oct. 01, 2024
MICHIHATA Masaki
ミチハタ マサキ | MICHIHATA Masaki
Affiliation and department：
Job title：
Assistant Professor
Homepage URL (1)：
https://sites.google.com/view/masakimichihata/
Research field (1)：
Manufacturing and production engineering
Research keywords (6)：
Metrology based on optical resonances
, 長さ計測
, オンマシン計測
, インプロセス計測
, 幾何形状計測
, 超精密計測
Research theme for competitive and other funds (24)：
- 2023 - 2026 3次元空間座標基準モニタリングによる内面構造のナノスケール精度計測
- 2022 - 2025 次世代機能デバイス実現のための高品位・超高アスペクト比微細穴加工システムの開発
- 2022 - 2024 破壊的干渉照明を用いた次世代極細光ファイバ直径のナノ精度計測原理の確立
- 2021 - 2023 1nm表面異物欠陥の自律探索を実現する動的位相差検出型・近接場液相プローブ計測法
- 2020 - 2023 質量標準トレーサビリティ体系のための超高精度・広範囲なシリコン球体計測
- 2019 - 2022 ミューオンg-2/EDM精密測定のための検出器アライメントモニターの開発
- 2019 - 2022 動的位相同期制御による局在光場を用いた次世代微細機能構造のナノ欠陥超解像計測
- 2019 - 2021 空間局在光場並列制御によるナノ除去加工分解能・新概念光励起加工法の挑戦
- 2018 - 2020 Measurement of 3-dimensional standard shape in micro-scale using whispering gallery mode resonance
- 2017 - 2020 Fabrication of 3-dimensional metal structure with sub-100 nm resolution using optical potential
- 2018 - 2019 細径光ファイバ直径の高速インプロセス計測技術の開発
- 2015 - 2019 複合マイクロ粒子機能構造体生産のための局在光制御セルインマイクロファクトリの開発
- 2015 - 2017 On machine measurement of cutting tool profile using fluorescent from cutting fluid
- 2015 - 2017 Measurement of a micro-sphere using whispering gallery mode resonance
- 2014 - 2016 Raman spectrum analysis for measuring temperature and material property on the nano-machined surface by short pulse laser
- 2013 - 2016 In-process nano surface processing control by using time resolved coherent phonon excitation on semiconductor target with
- 2012 - 2016 Laser micro-machining using photonic nanojets controlled by in-situ measurement
- 2012 - 2014 Study on ultra-precision viscosity measurement using a fluorescent probe
- 2012 - 2014 Analysis of polishing machanism using chemical reactive nanoparticles based on Raman spectrum enhanced by localized and propagating surface plasmon resonance
- 2012 - 2014 Sphere measurement using whispering gallery mode
- 2010 - 2011 Microsphere resonator based micro-probe for 3-dimensional coordinate metrology
- 2009 - 2011 Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning Study on molecular processing by using fullerenol for digital nano-patterning
- 2009 - 2011 A novel fabrication technique based on coherent phonon oscillation by using femto pulse train beam
- 2008 - 2009 レーザトラッピングプローブを用いたナノ3次元座標計測に関する研究
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Papers (72)：
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Masaki Michihata, Souki Fujimura, Shuzo Masui, Satoru Takahashi. Concept of error compensation for non-orthogonality in two-axis displacement measurement system utilizing single grating scale and Littrow configuration. Journal of Manufacturing Science and Engineering. 2024. 1-26
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Ryo Sato, Kuangyi Li, Masaki Michihata, Satoru Takahashi, Wei Gao. Advanced Sensing and Machine Learning Technologies for Intelligent Measurement in Smart and Precision Manufacturing. International Journal of Automation Technology. 2024. 18. 4. 545-580
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Masaki Michihata, Shuhei Goda, Shuzo Masui, Satoru Takahashi. Longitudinal Mode Number Estimation of External Cavity Diode Laser Using Dual Periodic Grating for Optical Profiler System. Sensors. 2024. 24. 12. 3821-3821
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Motoya Yoshikawa, Saeko Fujii, Shotaro Kadoya, Tatsuya Sugihara, Masaki Michihata, Satoru Takahashi. Fluorescence-Based Calibration Model for In-Situ Measurement of Micro-scaled Lubricant Thickness Distribution at Indentation Interface. Nanomanufacturing and Metrology. 2024. 7. 1
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Ryohei Omine, Shuzo Masui, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi. Manipulation of large, irregular-shape particles using contour-tracking optical tweezers. Optics Letters. 2024. 49. 10. 2773-2773
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Patents (9)：
Books (2)：
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Bilingual edition 精密計測学 Precision Metrology
朝倉書店 2024 ISBN:4254201788
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Optical micro-CMM, Metrology (Precision Manufacturing series)
Springer 2019
Lectures and oral presentations (15)：
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先端加工技術のためのナノインプロセス計測
(NMIJ 計測クラブ 長さクラブ・CMM ユーザーズクラブ合同講演会 2024)
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Laser Induced Fluorescence (LIF)を用いた三次元形状計測への新たな展開
(将来技術研究会(ATOM) 2024)
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ナノ形状計測における表面位置センシングの重要性と新たな試み
(精密工学会 知的ナノ計測専門委員会総会 特別講演 2024)
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Diameter Measurement of sub-micrometer optical fiber based on interference signal of Mie scattered light
(International Symposium on Optomechatronic Technology (ISOT) 2023 2023)
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Ultra-sensitive optical resonance in micro-sphere used for dimensional measurement
(International Congress on Pure & Applied Chemistry (ICPAC) 2022)
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Education (6)：
Professional career (1)：
Work history (5)：
- 2019/04 - 現在 東京大学 工学系研究科 精密工学専攻 准教授
- 2015/04 - 2019/03 The University of Tokyo Research Center for Advanced Science and Technology
- 2010/04 - 2015/03 Osaka University Graduate School of Engineering, Division of Mechanical Engineering
- 2013/10 - 2014/01 National Physical Laboratory (NPL), Guest worker
- 2008/04 - 2010/03 日本学術振興会 特別研究員(DC2)
Committee career (25)：
- 2024/04 - 現在 精密工学会 学術交流委員
- 2024/04 - 現在 精密工学会 会誌編集委員
- 2023/04 - 現在 The Japan Society for Abrasive Technology Review Committee
- 2022/04 - 現在 精密工学会 校閲委員会分野幹事
- 2020/04 - 現在 将来技術研究会(ATOM) 幹事
- 2020/04 - 現在 文部科学省 科学技術・学術政策研究所 専門調査員
- 2017/07 - 現在 精密工学会 事業企画第3グループ(グループリーダー 2023〜)
- 2024/10 - International Conference on Precision Engineering (ICPE2024) Publication Committee Chair
- 2020/06 - 2022/03 日本機械学会 学術誌編修委員
- 2022 - 2022 Frontiers in manufacturing technology Associated Editor “Research Trends in Ultra-Precision Machining and measurement of Hard-and-Brittle Materials”
- 2021 - 2021 Nanomanufacturing and Metrology Associated Editor “Micro- and Nano-Metrology in Japan"
- 2018/04 - 2020/03 日本機械学会 生産加工・工作機械部門 運営委員
- 2018/04 - 2020/03 日本機械学会 生産加工・工作機械部門 第1企画委員会 幹事
- 2019 - 2020 日本光学会 光学シンポジウム 実行委員
- 2016/04 - 2019/03 精密工学会 会誌編集委員
- 2019 - 2019 International conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN) 2019 Deputy secretary
- 2019 - International Symposium on Measurement and Intelligent Instruments (ISMTII) 2019 Program committee
- 2016/04 - 2018/03 精密工学会 事業部会 統括幹事
- 2014/04 - 2018/03 精密工学会 国際交流委員
- 2009/04 - 2018/03 精密工学会 アフィリエイト委員
- 2018 - 2018 International Symposium on Optomechatronics Technology (ISOT) 2018 Program committee
- 2016 - 2016 International Symposium on Optomechatronics Technology (ISOT) 2016 Local general committee
- 2014 - 2014 Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI) 2014 Program committee
- 2007/04 - 2010/03 精密工学会 学生編集委員
- 2010 - 2010 International Symposium on Measurement and Quality Control (ISMQC) 2010 Local organizing committee
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Awards (33)：
- 2023/11 - ASPEN2023 Best Paper Award Fabrication of Functional Surface using Water Jet Guided Laser Processing: Mechanism of Surface Structure Fabrication by Underwater Processing of the Workpiece
- 2023/11 - ASPEN2023 Best Paper Award A Novel Single-Microparticle Total Analysis System Driven by Optical Tweezers
- 2023/09 - ISMTII2023 Best Paper Award Super-resolution Imaging of Sub-diffraction-limited Pattern with Superlens based on Deep Learning
- 2023/09 - ISMTII2023 Best Paper Award In-process Observation of Physical Phenomena Inside the Workpiece Processed by Water Jet Guided Laser
- 2022/11 - ASPEN2022 Best Paper Award Optical depth measurement for microgrooves: A self-interferometry method based on near field polarization analysis
- 2022/01 - Nanomanufacutring and metrology Excellent article award: Surface imaging technique by an optically trapped microsphere in air condition
- 2020/08 - 里見奨学会 里見賞 光共振モード解析に基づく超高精度球体計測原理の確立
- 2019/09 - 精密工学会 メカノフォトニクス専門委員会 吉澤論文賞 Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale
- 2019/09 - ISMTII 2019 Young Researcher Award In-process measurement technique of micro-fiber diameter with interfered scattering pattern of two beam irradiation
- 2019/03 - Japan Society for Precision Engineering JSPE Best Paper Award One-shot stereolithography for biomimetic micro hemisphere covered with relief structure
- 2018/11 - ICPE2018 Best Paper Award Analysing tapered fiber-microsphere coupling for diameter measurement of microsphere using whispering gallery mode resonance
- 2018/10 - JSME, Manufacturing and Machine Tool Division Certificate of Merit for Outstanding Presentation
- 2018/08 - ISPEMI 2018 Excellent Paper Award Dielectric microsphere measurement using whispering gallery mode resonance
- 2017/11 - NF Foundation R&D Encouragement Award
- 2017/09 - ISMTII2017 Best Paper Award 2017 In-process measurement on the thickness of photosensitive resin in evanescent wave-based nano- stereolithography
- 2017/09 - International Journal of Automation Technology Best Paper Award 2017 Fundamental study on novel on-machine measurement method of cutting tool edge profile based on fluorescent confocal microscope
- 2017/04 - 日本機械学会 奨励賞(研究) マイクロスケール3次元形状標準を実現する超精密光応用計測の研究
- 2016/03 - 日本機械学会 関西支部 関西支部賞 奨励賞 Whispering gallery modeを用いたマイクロ球の直径計測に関する研究
- 2015/10 - 日本機械学会 生産加工・工作機械部門 優秀講演論文表彰 High-sensitive optical measurement of fine particulate defects on Si wafer surface with liquid probe
- 2015/10 - ISOT2015 Best Innovation Award On-machine measurement of cutting tool edge profile by detecting fluorescence from cutting fluid
- 2015/10 - MASAK Foundation Commendation for research paper Measurement of stylus-probe sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery mode
- 2015/03 - Japan Society for Abrasive Technology Best Paper Award
- 2015/03 - Japan Society for Precision Engineering Numata Memorial Paper Award
- 2014/05 - 工作機械技術振興財団 奨励賞
- 2013/10 - International Journal of Optomechatronics Koh Young Best Paper Award New technique for single-beam gradient-force optical trapping in air
- 2012/10 - ISOT2012 Best Paper Award Mode selective probing method of micro trench structure using optically trapped probe” International Symposium on Optomechatronic Technologies
- 2011/11 - ASPEN2011 President excellent award In-situ Raman analysis of chemical reaction for copper-CMP using water-soluble fullerenol
- 2011/09 - LMPMI2011 Best paper award Damping nature of vibrated surface-sensing probe controlled by optical radiation pressure
- 2011/05 - 工作機械技術 振興財団 奨励賞 WGM 共振を用いたマ イクロ粒子における真球 度評価の基礎的研究
- 2011/03 - The 6th ICOMM Outstanding paper award Measurement of micro figure using microprobe for coordinate metrology controlled by optical radiation
- 2010/03 - 自動車技術会 大学院研究奨励賞 ナノ座標測定における光放射圧マイクロプロー ブに関する研究
- 2009/12 - 日本ナショナルインスツルメンツ アプリケーション コンテスト 2009 学生部門 優秀賞 ナノ/マイクロ形状の ための座標測定システ ム
- 2009/05 - 精密工学会関西支部 ベストポスタープレゼンテーション賞 ナノ三次元座標測定の ための光放射圧マイクロ プローブに関する研究
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Association Membership(s) (3)：
応用物理学会
, THE JAPAN SOCIETY OF MECHANICAL ENGINEERS
, THE JAPAN SOCIETY FOR PRECISION ENGINEERING
