Art

J-GLOBAL ID：201802227419180313   Reference number：18A1919122

Basic study on optical probe lateral resolution by the collecting laser irradiation

レーザの集中照射を利用した光プローブの水平分解能向上に関する基礎研究

Author (2)： SAWANO HIROSHI (明治大学理工学部) ,  MINAMI KENTA (明治大学理工学部)
Material： 実験力学  (JSEM)
Volume： 18  Issue： 3  Page： 206-213(J-STAGE)  Publication year： 2018 
JST Material Number： L4590A  ISSN： 1346-4930  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *laser irradiation ,  *optical probe ,  *resolving power ,  *shape measurement ,  length ,  *measurement accuracy ,  experiment ,  height ,  standard specimen ,  working and processing ,  *precision measurement ,  *high-resolution ,  spot size ,  verification experiment ,  level difference ,  parts processing ,  *machining accuracy
Semi thesaurus term： *machining accuracy ,  *レーザ集中照射 ,  *horizontal resolution ,  vertical resolution

Author keywords (10)： Profile measurement ,  Optical probe ,  High lateral resolution ,  Collecting laser irradiation ,  Step shape ,  Profile measurement ,  Optical probe ,  High lateral resolution ,  Collecting laser irradiation ,  Step shape

JST classification (2)： Measuring methods and instruments of length,area,cross section,volume,angle  (AD05020O) ,  Optical instruments and techniques in general  (BD07010S)

Reference (10)：

• 1) Peters, J. et al.: Contribution of CIRP to the development of metrology and surface quality evaluation during the last fifty years, CIRP Annals, 50-2 (2001), 471-488.
• 2) Lonardo, P.M., Lucca, D.A. and Chiffre, L.D.: Emerging trends in surface metrology, CIRP Annals, 51-2 (2002), 701-723.
• 3) Ishizu, C. and Nemoto, K.: Current state of minute form measuring technology (in Japanese), Journal of the Japan Society for Precision Engineering, 74-3 (2008), 235-238.
• 4) Binnig, G., Rohrer, H., Gerber, C. and Weibel E.: Surface studies by scanning tunneling microscopy, Physical Review Letters, 49-1 (1982), 57-61.
• 5) Binnig, G., Quate, C.F. and Gerber C.: Atomic force microscope, Physical Review Letters, 56-9 (1986), 930-933.

Terms in the title (5)： レーザ ,  光プローブ ,  水平分解能 ,  基礎 ,  研究