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J-GLOBAL ID:201802228032489516   Reference number:18A1789961

マルチフェーズプラズマ反応場-革新的な材料プロセス創製に向けて-

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Volume: 94  Issue:Page: 441-448  Publication year: Sep. 25, 2018 
JST Material Number: G0114A  ISSN: 0918-7928  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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