About SU Li-Wen
About Kyushu Univ., Fukuoka, JPN
About CHEN Weiting
About Kyushu Univ., Fukuoka, JPN
About UCHINO Kiichiro
About Kyushu Univ., Fukuoka, JPN
About KAWAI Yoshinobu
About Kyushu Univ., Fukuoka, JPN
About Japanese Journal of Applied Physics
About VHF
About plasma
About plasma simulation
About silane
About electron density
About spatial distribution
About radical
About radio frequency plasma
About monosilane
About Gas discharges
About Ionization phenomena
About 極
About VHF
About SiH4
About プラズマ
About 2次元
About シミュレーション