Art

J-GLOBAL ID：201802253978360873   Reference number：18A1236910

Modulation transfer function analysis of silicon X-ray sensor with trench-structured photodiodes

トレンチ構造フォトダイオードを用いたシリコンX線センサの変調伝達関数解析

Author (6)： Ariyoshi Tetsuya (Center for Microelectronic Systems, Kyushu Institute of Technology) ,  Iwasa Jumpei (Center for Microelectronic Systems, Kyushu Institute of Technology) ,  Takane Yuta (Center for Microelectronic Systems, Kyushu Institute of Technology) ,  Sakamoto Kenji (Center for Microelectronic Systems, Kyushu Institute of Technology) ,  Baba Akiyoshi (Center for Microelectronic Systems, Kyushu Institute of Technology) ,  Arima Yutaka (Center for Microelectronic Systems, Kyushu Institute of Technology)
Material： IEICE Electronics Express (Web)  (IEICE Electron Express (Web))
Volume： 15  Issue： 11  Page： 20180177(J-STAGE)  Publication year： 2018 
JST Material Number： U0039A  ISSN： 1349-2543  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *roadway ,  *groove ,  *photodiode ,  *silicon ,  *X-ray detector ,  *optical transfer function ,  Compton scattering ,  pixel ,  image blur
Semi thesaurus term： *X-ray sensor ,  *silicon ,  *trench ,  *modulation transfer function

Author keywords (6)： X-ray sensor ,  silicon sensor ,  silicon wafer ,  trench photodiode ,  Compton scattering ,  modulation transfer function (MTF)

JST classification (2)： Photodetectors  (NC03083X) ,  Semiconductor integrated circuit  (NC03162T)

Reference (10)：

• [1] N. Gehrels, et al.: “Hard X-ray and low-energy gamma-ray spectrometers,” Sol. Phys. 118 (1988) 233 (DOI: 10.1007/BF00148595).
• [2] M. Ruat and C. Ponchut: “Characterization of a pixelated CdTe X-ray detector using the timepix photon-counting readout chip,” IEEE Trans. Nucl. Sci. 59 (2012) 2392 (DOI: 10.1109/TNS.2012.2210909).
• [3] A. Owens and A. Peacock: “Compound semiconductor radiation detectors,” Nucl. Instrum. Methods Phys. Res. Sect. A 531 (2004) 18 (DOI: 10.1016/j.nima.2004.05.071).
• [4] XCOM: Photon Cross Sections Database: https://www.nist.gov/pml/xcom-photon-cross-sections-database.
• [5] T. Ariyoshi, et al.: “Silicon trench photodiodes on a wafer for efficient X-ray-to-current signal conversion using side-X-ray-irradiation mode,” Jpn. J. Appl. Phys. 57 (2018) 04FH04 (DOI: 10.7567/JJAP.57.04FH04).

Terms in the title (6)： トレンチ ,  フォトダイオード ,  シリコン ,  X線センサ ,  変調伝達関数 ,  解析