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J-GLOBAL ID：201802256135089938   Reference number：18A1892909

Effect of Oxygen Plasma Treatment on Film Structure for Different Types of DLC film

異なるタイプのDLC膜の膜構造に及ぼす酸素プラズマ処理の影響

Author (6)： Mayama Tatsuya (Tokyo Denki University) ,  Hiratsuka Masanori (Nanotec Corporation) ,  Nakamori Hideki (Nanotec Corporation) ,  Homma Akihiko (Tokyo Denki University) ,  Hirakuri Kenji (Tokyo Denki University) ,  Ohgoe Yasuharu (Tokyo Denki University)
Material： Transactions of the Materials Research Society of Japan  (Trans Mater Res Soc Jpn)
Volume： 43  Issue： 5  Page： 275-278(J-STAGE)  Publication year： 2018 
JST Material Number： L4468A  ISSN： 1382-3469  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *DLC film ,  *membrane structure ,  plasma ,  *Oxygen ,  *plasma treatment ,  *chemical vapor deposition ,  direct current ,  radiofrequency discharge ,  ionization ,  magnetron sputtering ,  substrate (plate) ,  silicon ,  *film thickness ,  *carbonyl group ,  time dependence ,  X-ray photoelectron spectroscopy ,  *FWHM ,  *depth profile ,  oxygen plasma
Semi thesaurus term： CVD ,  HiPIMS ,  X-ray photoelectron spectroscopy ,  ionized vapor deposition ,  depth profile ,  full-width-half-maximum

Author keywords (8)： DLC films ,  Oxygen plasma treatment ,  C=O bonds ,  depth profile of film structure ,  DLC films ,  Oxygen plasma treatment ,  C=O bonds ,  depth profile of film structure

JST classification (2)： Thin films of other inorganic compounds  (BK14060A) ,  Applications of plasma  (BJ02110K)

Reference (10)：

• [1] A. Catena, S Agnello, L. Rösken, H. Bergen, E Recktenwald, F. Bernsmann, H Busch, M. Cannas, F. Gelardi, B. Hahn, S. Wehner, C. Fischer, Carbon, 96, 61-671 (2016)
• [2] T. Hasebe, A. Hotta, H. Kodama, A. Kamijo, K. Takahashi, T. Suzuki, New Diamond and Frontier Carbon Technology, 17, 263-279 (2007)
• [3] J. Robertson, Materials Science and Engineering, 37, 129-281 (2002)
• [4] J. Robertson, Materials Science and Engineering, 37, 129-281 (2002)
• [5] A. Grill, Diamond Related Materials, 12, 166-170 (2003)

Terms in the title (4)： タイプ ,  DLC膜 ,  膜構造 ,  酸素プラズマ