Art

J-GLOBAL ID：201802276935569071   Reference number：18A2074620

Dependence of surface morphology at initial growth of CdTe on the II/VI on (2 1 1) Si substrates by vapor phase epitaxy using metallic Cd source

金属Cd源を用いた気相エピタクシーによる(211)Si基板上のII/VI上のCdTeの初期成長における表面形態の依存性【JST・京大機械翻訳】

Author (7)： Iso Kenji (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan) ,  Iso Kenji (R&TD Center, Tsukuba Plant, Mitsubishi Chemical Corporation, Ushiku, Ibaraki 300-1295, Japan) ,  Gokudan Yuya (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan) ,  Shiraishi Masumi (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan) ,  Nishikado Minae (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan) ,  Murakami Hisashi (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan) ,  Koukitu Akinori (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo 184-8588, Japan)
Material： Journal of Crystal Growth  (J Cryst Growth)
Volume： 506  Page： 185-189  Publication year： 2019 
JST Material Number： B0942A  ISSN： 0022-0248  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： The initial growth of CdTe hav...

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Thesaurus term： interface (surface) ,  lower layer ,  *vapor phase growth ,  step flow ,  *epitaxy ,  *cadmium telluride ,  nucleation ,  *Cadmium ,  terrace ,  *surface morphology ,  *early stage growth ,  *Si wafer
Semi thesaurus term： ヒロック , 【Automatic Indexing@JST】

Author keywords (4)： A1. Crystal morphology ,  A3. Vapor phase epitaxy ,  B1. Cadmium compounds ,  B2. Semiconducting II-VI materials

JST classification (1)： Semiconductor thin films  (BK14040E)

Terms in the title (7)： Cd ,  気相エピタクシー ,  Si基板 ,  CdTe ,  初期成長 ,  表面形態 ,  依存性