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J-GLOBAL ID：201802289242728830
Reference number：18A0110561
Asymmetric metal-insulator-metal (MIM) structure formed by pulsed Nd:YAG laser deposition with titanium nitride (TiN) and aluminum nitride (AlN)
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Author (1)：
Material：
Volume：
10356
Page：
103560B.1-103560B.16
Publication year：
2017
JST Material Number：
D0943A
ISSN：
0277-786X
CODEN：
PSISDG
Document type：
Proceedings
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Terms in the title (6)：
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