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J-GLOBAL ID:201902239182715199   Reference number:19A1569504

高密度プラズマを用いた細穴内面の高機能成膜技術

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Material:
Volume: 333rd  Page: 43-49  Publication year: Jun. 20, 2019 
JST Material Number: F0656B  Document type: Proceedings
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Vapor plating 
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