Art
J-GLOBAL ID：201902259289336296   Reference number：19A0188199

Surface analysis of argon and oxygen plasma-treated gold for room temperature wafer scale gold-gold bonding

室温ウエハスケール金-金結合のためのアルゴンと酸素プラズマ処理金の表面分析【JST・京大機械翻訳】
Author (7)：
Yamamoto Michitaka

About Yamamoto Michitaka

(Graduate School of Frontier Sciences, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa-shi, Chiba, 277-8563, Japan)

About Graduate School of Frontier Sciences, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa-shi, Chiba, 277-8563, Japan

, 
Matsumae Takashi

About Matsumae Takashi

(National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan)

About National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan

, 
Kurashima Yuichi

About Kurashima Yuichi

(National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan)

About National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan

, 
Takagi Hideki

About Takagi Hideki

(National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan)

About National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan

, 
Suga Tadatomo

About Suga Tadatomo

(School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan)

About School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan

, 
Itoh Toshihiro

About Itoh Toshihiro

(Graduate School of Frontier Sciences, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa-shi, Chiba, 277-8563, Japan)

About Graduate School of Frontier Sciences, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa-shi, Chiba, 277-8563, Japan

, 
Higurashi Eiji

About Higurashi Eiji

(National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan)

About National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki, 305-8564, Japan


Material：
IEEE Conference Proceedings  (IEEE Conf Proc)

About IEEE Conference Proceedings


Volume： 2018  Issue： ICSJ  Page： 127-128  Publication year： 2018 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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The effects of Ar and O$_{¥mat...
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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surface analysis

About surface analysis

, 
*gold

About gold

, 
surface quality

About surface quality

, 
*argon

About argon

, 
*plasma

About plasma

, 
*plasma treatment

About plasma treatment

, 
X-ray photoelectron spectroscopy

About X-ray photoelectron spectroscopy


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
結合強度

About 結合強度

, 
*酸素プラズマ

About 酸素プラズマ

, 【Automatic Indexing@JST】
JST classification (3)：
JST classification
Category name(code) classified by JST.
Code theory 
(ND02030R)

About Code theory

,  Special-purpose arithmetic and control units 
(JC04030Y)

About Special-purpose arithmetic and control units

,  Speach processing 
(JE05000E)

About Speach processing

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
室温

About 室温

, 
ウエハ

About ウエハ

, 
スケール

About スケール

, 
金

About 金

, 
アルゴン

About アルゴン

, 
酸素プラズマ

About 酸素プラズマ

, 
表面分析

About 表面分析


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