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J-GLOBAL ID：201902259952757487   Reference number：19A0875965

Vapor Phase Epitaxy of (133) and (211) CdTe on (211) Si Substrates Using Metallic Cd Source

金属Cd源を用いた(211)Si基板上の(133)および(211)CdTeの気相エピタクシー【JST・京大機械翻訳】

Author (7)： Iso Kenji (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan) ,  Iso Kenji (R&TD Center, Tsukuba Plant, Mitsubishi Chemical Corporation, Ushiku, Ibaraki, Japan) ,  Gokudan Yuya (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan) ,  Shiraishi Masumi (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan) ,  Nishikado Minae (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan) ,  Murakami Hisashi (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan) ,  Koukitu Akinori (Department of Applied Chemistry, Graduate School of Engineering, Tokyo University of Agriculture and Technology, Koganei, Tokyo, Japan)
Material： Journal of Electronic Materials  (J Electron Mater)
Volume： 48  Issue： 1  Page： 454-459  Publication year： 2019 
JST Material Number： D0277B  ISSN： 0361-5235  Document type： Article
Article type： 原著論文  Country of issue： Germany, Federal Republic of (DEU)  Language： ENGLISH (EN)

Abstract/Point： Single-crystalline CdTe films ...

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Thesaurus term： step flow ,  *cadmium telluride ,  single crystal ,  precursor(substance) ,  *vapor phase growth ,  *cadmium ,  FWHM ,  facet ,  nucleation
Semi thesaurus term： テラス ,  結晶品質 ,  ヒロック ,  表面形態 ,  エピタキシャル膜 ,  *シリコンウエハ , 【Automatic Indexing@JST】

Author keywords (5)： CdTe ,  vapor phase epitaxy ,  twin ,  II/VI ,  metallic cadmium

JST classification (3)： Semiconductor thin films  (BK14040E) ,  Semiconductor-semiconductor contacts without Gr.13-15 element compounds  (BM03083P) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (4)： Cd ,  Si基板 ,  CdTe ,  気相エピタクシー