Art
J-GLOBAL ID：201902265016276850   Reference number：19A2268992

Electron-beam enhanced creep deformation of amorphous silicon nano-cantilever

非晶質シリコンナノカンチレバーのElectronビーム強化クリープ変形【JST・京大機械翻訳】
Author (4)：
Hirakata Hiroyuki

About Hirakata Hiroyuki

(Department of Mechanical Engineering and Science, Kyoto University, Kyoto-daigaku-Katsura, Nishikyo-ku, Kyoto 615-8540, Japan)

About Department of Mechanical Engineering and Science, Kyoto University, Kyoto-daigaku-Katsura, Nishikyo-ku, Kyoto 615-8540, Japan

, 
Konishi Kenta

About Konishi Kenta

(Department of Mechanical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan)

About Department of Mechanical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan

, 
Kondo Toshiyuki

About Kondo Toshiyuki

(Department of Mechanical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan)

About Department of Mechanical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan

, 
Minoshima Kohji

About Minoshima Kohji

(Department of Mechanical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan)

About Department of Mechanical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan


Material：
Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)

About Journal of Applied Physics


Volume： 126  Issue： 10  Page： 105102-105102-10  Publication year： 2019 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
fracture strength

About fracture strength

, 
*creep

About creep

, 
*amorphous silicon

About amorphous silicon

, 
electron beam

About electron beam

, 
nanostructure

About nanostructure

, 
burst

About burst

, 
mechanical property

About mechanical property


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
耐クリープ性

About 耐クリープ性

, 
クリープ挙動

About クリープ挙動

, 
定常状態

About 定常状態

, 
斜め蒸着

About 斜め蒸着

, 
電界放出型走査電子顕微鏡

About 電界放出型走査電子顕微鏡

, 
クリープ特性

About クリープ特性

, 
*ナノカンチレバー

About ナノカンチレバー

, 【Automatic Indexing@JST】
JST classification (3)：
JST classification
Category name(code) classified by JST.
Lattice defects in semiconductors 
(BK12040Q)

About Lattice defects in semiconductors

,  Semiconductor-metal contacts 
(BM03084G)

About Semiconductor-metal contacts

,  Irradiational changes semiconductors 
(BK16123E)

About Irradiational changes semiconductors

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
非晶質シリコン

About 非晶質シリコン

, 
ナノカンチレバー

About ナノカンチレバー

, 
ビーム

About ビーム

, 
強化

About 強化

, 
クリープ変形

About クリープ変形


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