Art

J-GLOBAL ID：201902276110815612   Reference number：19A2210175

Characterization of surface modification mechanisms for boron nitride films under plasma exposure

プラズマ曝露下の窒化ホウ素膜の表面改質機構のキャラクタリゼーション【JST・京大機械翻訳】

Author (6)： Higuchi Tomoya (Graduate School of Engineering, Kyoto University, Nishikyo-ku, Kyoto 615-8540, Japan) ,  Noma Masao (SHINKO SEIKI CO., LTD., Moriyama, Shiga 524-0051, Japan) ,  Yamashita Michiru (Hyogo Prefectural Institute of Technology, Kobe, Hyogo 654-0037, Japan) ,  Urabe Keiichiro (Graduate School of Engineering, Kyoto University, Nishikyo-ku, Kyoto 615-8540, Japan) ,  Hasegawa Shigehiko (The Institute of Scientific and Industrial Research, Osaka University, Ibaraki, Osaka 567-0047, Japan) ,  Eriguchi Koji (Graduate School of Engineering, Kyoto University, Nishikyo-ku, Kyoto 615-8540, Japan)
Material： Surface & Coatings Technology  (Surf Coat Technol)
Volume： 377  Page： Null  Publication year： 2019 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： The surface modification of a ...

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Thesaurus term： covering ,  *characterization ,  silicon ,  bias ,  simulation ,  reconstitution ,  *boron nitride ,  *surface modification ,  *plasma exposure ,  *plasma ,  Argon ,  hardness ,  molecular dynamics ,  nanoindentation ,  nano scale

Author keywords (6)： Boron nitride ,  Plasma ,  Ion energy ,  Hardness ,  Molecular dynamics simulation ,  Damage

JST classification (1)： Surface hardening  (WC03030E)

Terms in the title (4)： プラズマ曝露 ,  窒化ホウ素 ,  表面改質 ,  キャラクタリゼーション