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J-GLOBAL ID:201902288886028047   Reference number:19A1373153

レーザ応用加工の最前線 フェムト秒レーザ還元直接描画法によるCu系微細プリンティング

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Volume: 60  Issue:Page: 22-28  Publication year: Jun. 20, 2019 
JST Material Number: S0824A  ISSN: 0910-1985  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Powder compacting,sintering  ,  Manufacturing technology of solid-state devices 
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