Art

J-GLOBAL ID：202002249284856036   Reference number：20A1884275

Comparison of properties between Pr-Fe-B and Nd-Fe-B thick-film magnets applied to MEMS

MEMSに適用するPr-Fe-BとNd-Fe-B厚膜磁石の特性比較

Author (8)： Nakano Masaki (Graduate School of Engineering, Nagasaki University, 1-14 Bunkyo-machi, Nagasaki 852-8521, Japan) ,  Takeichi Sho (Graduate School of Engineering, Nagasaki University, 1-14 Bunkyo-machi, Nagasaki 852-8521, Japan) ,  Yamaguchi Takashi (Graduate School of Engineering, Nagasaki University, 1-14 Bunkyo-machi, Nagasaki 852-8521, Japan) ,  Takashima Keisuke (Graduate School of Engineering, Nagasaki University, 1-14 Bunkyo-machi, Nagasaki 852-8521, Japan) ,  Yamashita Akihiro (Graduate School of Engineering, Nagasaki University, 1-14 Bunkyo-machi, Nagasaki 852-8521, Japan) ,  Yanai Takeshi (Graduate School of Engineering, Nagasaki University, 1-14 Bunkyo-machi, Nagasaki 852-8521, Japan) ,  Shinshi Tadahiko (Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta-cho Midori-ku, Yokohama 226-8503, Japan) ,  Fukunaga Hirotoshi (Graduate School of Engineering, Nagasaki University, 1-14 Bunkyo-machi, Nagasaki 852-8521, Japan)
Material： Japanese Journal of Applied Physics  (JJAP)
Volume： 59  Issue： SE  Page： SEEE01 (5pp)  Publication year： Apr. 2020 
JST Material Number： G0520B  ISSN： 0021-4922  CODEN： JJAPB6  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *permanent magnet ,  neodymium ,  *magnetic material ,  *MEMS ,  praseodymium ,  iron ,  boron ,  buffer layer ,  mechanical property ,  silicon oxide ,  magnetic property ,  wafer ,  adhesion force
Semi thesaurus term： silicon substrate ,  *neodymium permanent magnet ,  *thick film magnet

JST classification (1)： Electromagnets  (NA05080G)

Terms in the title (5)： MEMS ,  Pr ,  Fe ,  Nd ,  厚膜磁石