Art
J-GLOBAL ID：202002288809740972   Reference number：20A1235573

Effect of gas composition on surface sterilization by using LF-microwave hybrid plasma source

LF-マイクロ波ハイブリッドプラズマ源を用いた表面滅菌に及ぼすガス組成の影響
Author (3)：
Tonmitr Norrawit

About Tonmitr Norrawit

(Graduate School of Engineering and Science, University of the Ryukyus, Okinawa 903-0213, Japan)

About Graduate School of Engineering and Science, University of the Ryukyus, Okinawa 903-0213, Japan

, 
Yonesu Akira

About Yonesu Akira

(Graduate School of Engineering and Science, University of the Ryukyus, Okinawa 903-0213, Japan)

About Graduate School of Engineering and Science, University of the Ryukyus, Okinawa 903-0213, Japan

, 
Hayashi Nobuya

About Hayashi Nobuya

(Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Fukuoka 816-8586, Japan)

About Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Fukuoka 816-8586, Japan


Material：
Japanese Journal of Applied Physics  (JJAP)

About Japanese Journal of Applied Physics


Volume： 59  Issue： SA  Page： SAAB02 (6pp)  Publication year： Jan. 2020 
JST Material Number： G0520B  ISSN： 0021-4922  CODEN： JJAPB6  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
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*plasma source

About plasma source

,...
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Thesaurus term/Semi thesaurus term
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gas composition

About gas composition

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Applications of plasma 
(BJ02110K)

About Applications of plasma

,  Sterilization methods 
(EG02040C)

About Sterilization methods

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
LF

About LF

, 
マイクロ波

About マイクロ波

, 
ハイブリッドプラズマ

About ハイブリッドプラズマ

, 
滅菌

About 滅菌

, 
ガス組成

About ガス組成


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