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ArticleJ-GLOBAL ID:200902015580196631整理番号:92A0363837

1H Nuclear Magnetic Resonance Study of Hydrogenated Amorphous Silicon Deposited from a Xe-diluted Silane Plasma.

Xe希釈シランプラズマから堆積した非晶質水素化けい素の1H核磁気共鳴研究

著者:HAYASHI S(National Chemical Lab. Industry, Ibaraki)、HAYAMIZU K(National Chemical Lab. Industry, Ibaraki)、MASHIMA S(Electrotechnical Lab., Ibaraki)・・・
資料名:Jpn J Appl Phys Part 1 巻:31 号:4 ページ:989-994
発行年:1992年04月
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