H. Urai, T. Makimura, M. Ogawa. Micrometer-Scale Photo-Direct Machining of Polydimethylsiloxane Using Laser Plasma EUV Radiations. Springer Proceedings in Physics. 2018. 202. 383-386
EUV ablation of polydimethylsiloxane elastomer
(Photonics West 2023)
Ablation of polydimethylsiloxane elastomer using laser-plasma EUV radiation
(16th International Conference on Laser Ablation 2022)
High-aspect micromachining of PDMS sheets using laser plasma EUV radiation
(The 22nd International Symposium on Laser Precision Microfabrication 2021)
Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma
(The 8th International Congress on Laser Advanced Materials Processing 2019)
Microfabrication of PDMS structures based on wave optics using EUV radiations from laser-produced plasma
(The 8th International Congress on Laser Advanced Materials Processing 2019)