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MEMS Technology for Optical Storage Systems
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Photonic structure and materials combined with micro/nano-electro-mechanical systems
(Proceedings of the 1st international workshop on functional materials -3rd international workshop on nanophysics and nanotechnology conference 2006)
MEMS for subwavelength optics
(The 6th US-Japan Joint Symposium on Nano systems 2006)
Micro/Nano Opt-Mechanical Systems Using Silicon Micromachining Technology
(Nanoengineering Symposium 2005 2005)