研究キーワード (6件)：
無機材料・物性
, 電子デバイス・機器工学
, 電子・電気材料工学
, Inorganic Material and Properties
, Electron device and Machineries Engineering
, Electronic and Electrical Material Engineering
Preparation of thin films by using Plasma based lon implantation.
Analysis of thin films by using XPS
Fundamental study on integrated circuits and micro-machining
Development of Road traffic sign system using LED emission with solar cell
Study on,hitride,and oxide metal films by sputlering.
全件表示
論文 (4件)：
K Vutova, G Mladenov, T Tanaka, K Kawabata. Simulation of the energy absorption and the resist development at sub-150 nm ion lithography. MICROELECTRONIC ENGINEERING. 2005. 78-79. 533-539
T Tanaka, M Suzuki, K Kawabata. Effect of DC bias on the deposition rate using RF-DC coupled magnetron sputtering for Mg thin films. THIN SOLID FILMS. 1999. 343. 57-59
T TANAKA, K KAWABATA. EFFECT OF DEPOSITION RATE ON DC BIAS VOLTAGE BY USING RF-DC COUPLED MAGNETRON SPUTTERING. FOURTH INTERNATIONAL CONFERENCE ON ELECTRON BEAM TECHNOLOGIES - EBT '94. 1994. 238-242
XPS profilography through angle resolved spectra(共著)
Abstracts of ELECTRONICA 1998
Textured surface analysis by x-ray photoelectron spectroscopy(共著)
Abstracts of ELECTRONICA 1998
電子デバイス-物性からICまで-
産業図書株式会社 1997
Stoichiometry control in r. f-d. c. coupled magnetron sputtering of AlNx(共著)
Proc. 5th Int. Conf. on Electron Beam Technologies 1997
X-ray Photoelectron Spectroscopy Measurements of TiNx Films and Ti Target Surface Nitrided by r. f. -d. c. Coupled Reactive Magnetron Sputtering(共著)
Proc. 5th Int. Conf. on Electron Beam Technologies 1997
