Research field (4):
Electric/electronic material engineering
, Thin-film surfaces and interfaces
, Crystal engineering
, Applied materials
Research keywords (8):
高温超伝導体薄膜
, ナノポーラスSi
, 金属シリサイド
, アモルファスSi薄膜
, High Tc Superconducting Films
, Nano Porous Si
, Metal Silicide
, Amorphous Si Films
Research theme for competitive and other funds (8):
高温超伝導薄膜の成長プロセスと物性
ナノポーラスSi層の作製と微細構造
金属/a-Si :H積層膜における界面反応と金属シリサイドの形成機構
シリコン系アモルファス半導体薄膜の構造的研究
Growth Process and Properties of High Temperature Super-conducting Films.
Preparation and Fine Structures of Nano Porous Si Layer
Interfacial Reaction and Metal Silicide Formation in Metal/a-Si : H Layered Films
Structural Studies of Si Based Amorphous Semiconductor Films.