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J-GLOBAL ID：200901087272355050   Update date: Dec. 26, 2022

Takahashi Kazue

タカハシ カズエ | Takahashi Kazue
Research field  (1)： Thin-film surfaces and interfaces
Research keywords  (1)： Particle adhesion and removal
Research theme for competitive and other funds  (2)：
  • 2014 - 2017 ディープサブミクロン対応の付着微粒子静電清浄化システムの開発
  • 2011 - 2014 ディープサブミクロン対応の付着微粒子静電除去技術の基礎開発
Papers (4)：
Lectures and oral presentations  (6)：
  • Removal characteristics of fine particles deposited on the silicon surface by using polymer films
    (The 55th Symposium on Powder Science and Technology 2017)
  • Adhesion of fine glass spheres dispersed by air flow to flat plate
    (The 54th Symposium on Powder Science and Technology 2016)
  • Dependence of applied pressure on the removal rate of adhered particles on silicon surfaces by using plastic films
    (The 54th Symposium on Powder Science and Technology 2016)
  • Removal of particles on surfaces by using the atmospheric pressure
    (2015)
  • Dependence of particle size on the removal of particles on silicon surface by using electrostatic force
    (2014)
ｍore...
Education (1)：
  • - 1971 Tohoku University Faculty of Science Department of Physics
Professional career (1)：
  • 博士(工学) (東北大学)
Committee career (1)：
  • 2008 - 現在 日本表面真空学会 真空技術者担当専門委員会委員長
Association Membership(s) (2)：
American Vacuum Society ,  The Japan Society of Vacuum and Surface Science
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