Art
J-GLOBAL ID：201702276147944837   Reference number：17A1815053

Removal of Glass Particles from a Silicon Surface by Adhesive Force of Polymer Films

高分子フィルムの付着力を利用したシリコン表面上の微粒子除去
Author (1)：
TAKAHASHI KAZUE

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Material：
粉体工学会誌  (Journal of the Society of Powder Technology, Japan)

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Volume： 54  Issue： 9  Page： 582-589(J-STAGE)  Publication year： 2017 
JST Material Number： S0129A  ISSN： 0386-6157  CODEN： FKKADA  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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Fine spherical glass particles...
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
urethane rubber

About urethane rubber

, 
low density polyethylene

About low density polyethylene

, 
*polymer thin film

About polymer thin film

, 
*removal

About removal

, 
*cleaning (washing)

About cleaning (washing)

, 
silicon

About silicon

, 
adhesion force

About adhesion force

, 
sphere

About sphere

, 
force

About force

, 
parts

About parts

, 
conductive property

About conductive property

, 
surface quality

About surface quality

, 
*particle removal

About particle removal

, 
electrostatic force

About electrostatic force


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*微粒子除去

About 微粒子除去

, 
ガラス球

About ガラス球

, 
乾式洗浄

About 乾式洗浄

, 
押付力

About 押付力


Author keywords (10)：
Particle removal

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, 
Dry cleaning

About Dry cleaning

, 
Particle adhesion

About Particle adhesion

, 
Polyethylene film

About Polyethylene film

, 
Polyurethane rubber

About Polyurethane rubber

, 
Particle removal

About Particle removal

, 
Dry cleaning

About Dry cleaning

, 
Particle adhesion

About Particle adhesion

, 
Polyethylene film

About Polyethylene film

, 
Polyurethane rubber

About Polyurethane rubber

JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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Reference (26)：
ｍore...
Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
高分子フィルム

About 高分子フィルム

, 
付着力

About 付着力

, 
シリコン

About シリコン

, 
微粒子除去

About 微粒子除去


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