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J-GLOBAL ID：201201046563535745 Update date: Nov. 25, 2023

Satomi Tajima

タジマサトミ | Satomi Tajima

Research field (3)： Electronic devices and equipment , Basic plasma science , Thin-film surfaces and interfaces

Research keywords (4)： Quality assurance , Semiconductor package , Plasma process , Surface analysis

Research theme for competitive and other funds (9)：

2014 - 2017 Si slow etch process development and evaluation of the etching mechanisms for the elimination of plasma-induced damage around the gate
2015 - 2016 Evaluate the adsorption of C, N, O, and F on the surface of materials
2015 - 2015 Development of the non-destructive high-speed in-line plasma adhesion pre-treatment evaluation system
2014 - 2015 Establishment of the regional open-platform for the high-speed adhesion improvement using atmospheric-pressure plasma
2013 - 2015 Development of the small hydrocarbon gas sensors using multilayered nanocarbon structure

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Papers (21)：

Patents (16)：

Books (3)：

パワーデバイス実装に用いられる異種材料のプラズマ接着前処理
一般社団法人エレクトロニクス実装学会 2016
プラズマを用いた異種材料の表面改質と接着前処理のノウハウ
公益社団法人精密工学会 2015
The effect of humidity on the chemical dry etching of Si using F2 + NOx -> F + FNOx reaction
2015

Lectures and oral presentations (4)：

Effect of the oxidation-reduction potential during Ni ferrite synthesis on FeNi nanoparticles
(2019)
Modeling molecules responsible for the sidewall protection during the chemical dry etching of silicon related materials using F2 + NOx -> F + FNOx
(9th International Conference on Reactive Plasmas/68rd Gaseous Electronics Conference /33th Symposium on Plasma Processing, (ICRP-9/GEC-68/SPP-33) 2015)
Change in optical properties by texturing Si compounds by F2 and NOx gases
(Japan Society of Applied Physics (JSAP)-Optical Society of America (OSA) Joint Symposia 2015 2015)
Chemical dry etching of Si using F2 and NO2 gases at elevated temperature
(7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/8th International Conference on Plasma-Nano Technology & Science (ISPlasma2015/IC-PLANTS2015) 2015)

Education (3)：

2002 - 2006 The University of California at Berkeley Graduate School of Engineering Department of Mechanical Engineering
2001 - 2001 The University of Washington Graduate School of Engineering Materials Science and Engineering
1998 - 2001 The University of Washington Graduate School of Engineering Department of Aeronautics & Astronautics

Professional career (1)：

Work history (1)：

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