2015 - 2018 Development of Nano-G Detection Method using Electroplated Au-Alloy with Controlled Crystal Structure
2011 - 2014 The study on human monitoring chip and multi-physics simulation technology
2011 - 2013 Fundamental Research on MEMS-based Bacterial Sensor
Papers (225)：
Ryohei Hori, Kazuya Fujita, Chun Yi Chen, Tomoyuki Kurioka, Jhen-Yang Wu, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Cross-sectional geometry effect on bending strength of gold micro-cantilever with trapezoidal cross-section. Micro and Nano Engineering. 2024. 23. 100259-100259
Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers. Micro and Nano Engineering. 2024. 23. 100249-100249
Syota Kanno, Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone, Tso-Fu Mark Chang. Effects of the strain rate in compression of electrodeposited gold micro-pillars toward the design of MEMS components. Micro and Nano Engineering. 2024. 100254
Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone. Warpage Study of Electrodeposited-Au Micro-Components with Ti/Au Multi-Layered Structures toward MEMS Applications. Journal of The Electrochemical Society. 2024
Kisuke Miyado, Devi Srujana Tenneti, Akira Onishi, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito. Serpentine spring design technique for high sensitivity MEMS capacitive accelerometer fabricated by gold multi-layer metal technology. Japanese Journal of Applied Physics. 2024. 63. 4. 04SP23-04SP23
本田 優斗, 崔 容俊, 村上 健介, 野田 俊彦, 高橋 一浩, 澤田 和明, 石井 仁, 町田 克之, 伊藤 浩之, 宮原 敏, et al. フォトゲート型蛍光センサによるレジオネラ属菌検知システムの検討-Detection system of bacteria, Legionella by photogate type optical sensor-第13回集積化MEMSシンポジウム. 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]. 2021. 38. 5p
本田優斗, CHOI Y. J., 村上健介, 野田俊彦, 高橋一浩, 澤田和明, 石井仁, 町田克之, 伊藤浩之, 二階堂靖彦, et al. Measurement system by photogate type fluorescent sensor for identification of Legionella. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2021. 68th
Novel method of bacterial identification using photogate-type fluorescence sensor : Application to Legionella erythra. 2020. 37. 5p
本田優斗, 田中佐和子, CHOI Y.J., 野田俊彦, 高橋一浩, 澤田和明, 石井仁, 町田克之, 二階堂靖彦, 齋藤光正, et al. Investigation of fluorescence detection by photogate-type optical sensor for bacterial identification. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2020. 67th
A 0.18-μm CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers
(IEICE Electronics Express 2018)
Observation of Legionella fluorescence using photogate-type fluorescent sensor
(2017)
Sub-1mG MEMS inertial sensors for biomedical applications
(2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) 2017)
C-12-13 A study of CMOS low-noise amplifier design method
(Proceedings of the IEICE General Conference 2016)
