Research field (3)：
Basic plasma science
, Nanobioscience
, Nanomaterials
Research keywords (5)：
原子層堆積法の工業応用
, Lipid bilayer membrane
, X-ray photo electron spectroscopy
, Infrard absorption spectroscopy
, Room Temperature Atomic Layer deposition
Research theme for competitive and other funds (2)：
2016 - 2019 Room temperature atomic layer deposition on protain particles
2014 - 2016 プラズマプロセスを用いた低温原子層堆積法の研究
Papers (52)：
Ryugo Tero, Jocelyn Min Yuan Lau, Kensaku Kanomata, Fumihiko Hirose. Controlling fluorescence quenching efficiency by graphene oxide in supported lipid bilayers using SiO2 layer fabricated by atomic layer deposition. Japanese Journal of Applied Physics. 2023. 62. SC. SC1041-SC1041
K. Saito, K. Yoshida, M. Miura, K. Kanomata, B. Ahmmad, S. Kubota, F. Hirose. Moisture barrier coating of AlN and Al<sub>2</sub>O<sub>3</sub> multilayer film prepared by low-temperature atomic layer deposition. Journal of Vacuum Science & Technology A. 2022. 40. 6. 062410-062410
Kentaro SAITO, Kazuki YOSHIDA, Masanori MIURA, Kensaku KANOMATA, Bashir AHMMAD, Shigeru KUBOTA, Fumihiko HIROSE. Low-Temperature Deposition of Yttrium Oxide on Flexible PET Films Using Time-Separated Yttrium Precursor and Oxidizer Injections. IEICE Transactions on Electronics. 2022. E105.C. 10. 604-609
Kentaro SAITO, Kazuki YOSHIDA, Masanori MIURA, Kensaku KANOMATA, Bashir AHMMAD, Shigeru KUBOTA, Fumihiko HIROSE. Low-Temperature Atomic Layer Deposition of AlN Using Trimethyl Aluminum and Plasma Excited Ar Diluted Ammonia. IEICE Transactions on Electronics. 2022. E105.C. 10. 596-603
Takeru Saito, Kazuki Yoshida, Kentaro Saito, Masanori Miura, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose. Multiple layers of aluminum silicate and silicon dioxide deposited by room-temperature atomic layer deposition for enhanced cation sorption. Journal of Vacuum Science & Technology A. 2022. 40. 4. 042406-042406
