Rchr
J-GLOBAL ID：200901009616399042
Update date: Sep. 14, 2022
Tada Tetsuya
タダ テツヤ | Tada Tetsuya
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Affiliation and department：
National Institute of Advanced Industrial Science and Technology
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Homepage URL (1)：
http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=T47291860
Research field (1)：
Electronic devices and equipment
Research keywords (3)：
ナノスケール加工技術 半導体
, Semiconductors
, Nano fabrication
Research theme for competitive and other funds (1)：
微細加工等
MISC (33)：
Yuichi Hiratsuka, Makoto Miyata, Tetsuya Tada, Taro Q. P. Uyeda. A microrotary motor powered by bacteria. PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA. 2006. 103. 37. 13618-13623
M Nishizawa, L Bolotov, T Tada, T Kanayama. Scanning tunneling microscopy detection of individual dopant atoms on wet-prepared Si(111): H surfaces. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 2006. 24. 1. 365-369
K Kimoto, T Tada, T Kanayama. Impact of aggressively shallow source/drain extensions on device performance. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. 2005. 44. 7A. 4843-4847
Poborchii, V, T Tada, T Kanayama. Giant heating of Si nanoparticles by weak laser light: Optical microspectroscopic study and application to particle modification. JOURNAL OF APPLIED PHYSICS. 2005. 97. 10. 104323-1-104323-5
Poborchii, V, T Tada, T Kanayama. Subwavelength-resolution Raman microscopy of si structures using metal-particle-topped AFM probe. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS. 2005. 44. 1-7. L202-L204
ｍore...
Patents (1)：
微細加工方法
Professional career (1)：
Ph.D.
Association Membership(s) (2)：
The Physical Society of Japan
, The Japan Society of Applied Physics
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