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J-GLOBAL ID:200902023083266157   Reference number:87A0359170

Anisotropic etching of single crystal silicon.

単結晶Siの異方性エッチング技術
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Volume: 53  Issue:Page: 849-852  Publication year: Jun. 1987 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices 
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