Art
J-GLOBAL ID：200902100401955654   Reference number：99A0615875

Chemical reaction engineering in the design of CVD reactors.

化学蒸着(CVD)反応器設計の反応工学
Author (3)：
KOMIYAMA H

About KOMIYAMA H

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
SHIMOGAKI Y

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(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
EGASHIRA Y

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(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN


Material：
Chemical Engineering Science  (Journal International de Genie Chimique)

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Volume： 54  Issue： 13/14  Page： 1941-1957  Publication year： Jul. 1999 
JST Material Number： B0254A  ISSN： 0009-2509  Document type： Article
Article type： 文献レビュー  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*chemical vapor deposition

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Chemical reaction engineering,chemical kinetics 
(XE01020M)

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,  Chemical reactor 
(XE01030X)

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Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
化学蒸着

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, 
CVD

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, 
反応器設計

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, 
反応工学

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