Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer.

TAKAYA Y; SHIMIZU H; TAKAHASHI S; MIYOSHI T

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J-GLOBAL ID：200902102661438281 Reference number：99A0313349

Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer.

レーザ・トラッピングとMirau干渉計に基づくナノ座標測定器用新探触子技術に関する基礎的研究

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Material：
Volume： 25 Issue： 1 Page： 9-18 Publication year： Jan. 1999
JST Material Number： W0315B ISSN： 0263-2241 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Measuring methods and instruments of length,area,cross section,volume,angle , Interferometry and interferometers

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