Rchr

J-GLOBAL ID：201301078932798140 Update date: Mar. 06, 2024

Takahashi Satoru

タカハシサトル | Takahashi Satoru

Affiliation and department：
Job title：教授
Other affiliations (1)：

大学院工学系研究科教授

Homepage URL (1)： http://kaken.nii.ac.jp/d/r/30283724.ja.html

Research field (5)： Manufacturing and production engineering , Optical engineering and photonics , Nano/micro-systems , Mechanics and mechatronics , Robotics and intelligent systems

Research keywords (15)：レーザ応用計測 , エバネッセント光 , 光造形 , 欠陥検査 , 光散乱パターン , インプロセス計測 , 局在フォトン , 近接場光 , マイクロ光造形法 , マルチフォトンプローブ , マイクロマシン , 加工計測 , 三次元マイクロ加工 , 欠陥計測 , 膜厚計測

Research theme for competitive and other funds (35)：

2023 - 2028 複合物理融合メカニズム解明に基づいたウォータガイドレーザ加工法の科学的機能革新による次世代パワー半導体ダイシングの実現
2022 - 2028 計測標準と情報科学を援用した先端精密計測の卓越進化:10nm 超解像光学ルーペの開発
2023 - 2026 3次元空間座標基準モニタリングによる内面構造のナノスケール精度計測
2022 - 2025 次世代機能デバイス実現のための高品位・超高アスペクト比微細穴加工システムの開発
2022 - 2024 破壊的干渉照明を用いた次世代極細光ファイバ直径のナノ精度計測原理の確立

2021 - 2023 1nm表面異物欠陥の自律探索を実現する動的位相差検出型・近接場液相プローブ計測法

2020 - 2023 質量標準トレーサビリティ体系のための超高精度・広範囲なシリコン球体計測

2019 - 2022 動的位相同期制御による局在光場を用いた次世代微細機能構造のナノ欠陥超解像計測

2019 - 2021 Challenge of New Concept of Photo-Excited Nano-Removal Processing by Parallel Control of Spatially Localized Light

2018 - 2020 Measurement of 3-dimensional standard shape in micro-scale using whispering gallery mode resonance

2015 - 2019 Development of localized light-controlled cell-in-microfactories for the production of composite microparticle functional structures

2014 - 2019 Practical application of uncertainty estimation method in three dimensional measurement for high precision of next generation three dimensional shape

2015 - 2017 High Sensitive Optical Detection of Nano Particulate Defects with Autonomous Search-and-Split Liquid Probe

2014 - 2015 Challenging exploratory research on super resolution measurement of nano defects for next-generation functional fine structures by controlling dynamic localized light distribution

2011 - 2015 Development of laser-assisted micro removal processing tool controlled by the spatial light field allowing nanoscale correction for 3-D micro objects

2010 - 2015 Estimation Method of Unvertainty on Nanometer Three Dimensional Measurement

2013 - 2014 Fundamental research on cell-in-micro-factory based on active parallel controlling of localized light energy

2011 - 2012 Challenging exploratory research on non-destructive internal

2008 - 2010 Microfabrication of three-dimensional metal structures using localized photon interaction and photocatalyst nanoparticles

2006 - 2007 エバネッセント・マルチフォトンプローブによる超精密平坦加工面のナノ欠陥高速計測法

2004 - 2007 Study on uncertainty of measurement of coordinate metrology for next generation manufacturing system

2004 - 2006 赤外エバネッセント光による次世代半導体ウエハ機能薄膜のナノ欠陥計測法に関する研究

2004 - 2005 エバネッセント局在フォトンを利用したナノ光造形法に関する基礎的研究

2001 - 2003 DEVELOPMENT OF THE NANO-CMP PROCESS APPARATUS CONTROLLED BY OPTICAL RADISTION PRESSURE

2001 - 2002 Study on Laser Trapping Probe for Measuring Fine Machined 3-D Form with High Aspect Ratio

2001 - 2002 暗視野輪帯光学系を用いたSiウエハ加工表面欠陥計測に関する研究

2000 - 2002 Development of Nonlaminate Stereolithography System Using TFTLCD

2000 - 2001 Study on Nano-inprocess measurement of CMP defects on SiO2 filmed wafer surface

1999 - 2000 Nano-Defects Inspection in Polished Silicon Wafer Sub-Surface Using IR Evanescent Light

1999 - 2000 Nano In-Process Measurement of 3D Micro-Profile Using Optical Inverse Scattering

1999 - 2000 半導体微細回路パターンのナノインプロセス欠陥計測に関する研究

1998 - 1999 Development of Micromachining Tool Driven by Radiation Pressure

1997 - 1999 Study on Micro-machining Using a Small Particle Controlled by Optical Pressure.

1997 - 1998 Development of Laser Trapping Probe for The Nano-CMM

1997 - 1998 位相共役波を用いた三次元フォトリソグラフィに関する研究

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Papers (267)：

Masaki Michihata, Shotaro Kadoya, Satoru Takahashi. Diameter Measurement for Micro-Spheres via Coherent Scanning Interferometry with Reference to Gauge Block. International Journal of Automation Technology. 2024. 18. 1. 11-17
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi. Developmental framework of line edge roughness reference standards for next-generation functional micro-/nanostructures. Precision Engineering. 2023. 83. 152-158
Ryosuke Kizu, Ichiko Misumi, Akiko Hirai, Satoshi Gonda, Satoru Takahashi. Effect of white noise on roughness measurements of self-affine fractals. Measurement Science and Technology. 2023. 34. 10. 105003-105003
Hiromasa Kume, Masaki Michihata, Satoru Takahashi. Theoretical analysis on coherent optical super-resolution method for inspection of functional micro-structured surfaces with complex-amplitude-response distribution. Precision Engineering. 2023. 80. 138-159
Shusei Masuda, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi. Novel absolute length measurement method for etalon sensor using optical comb pulsed interference and harmonic etalon reflections. Measurement Science and Technology. 2023. 34. 5. 055205-055205

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MISC (371)：

高橋哲. Nano/Micro Optical Technology for Precision Engineering and Its Prospects. 2021. 87. 9
Guan Yizhao, Kume Hiromasa, Kadoya Shotaro, Michihata Masaki, Takahashi Satoru. The FDTD Analysis of Near-field Response for Microgroove Structure with Standing Wave Illumination:The Relationship of Microgroove Depth and Near-field Phase Response. Proceedings of JSPE Semestrial Meeting. 2021. 2021. 577-578
Satoru Takahashi. Precision measurement in heisei: A review -development of optical measurement supporting nano/Micro Manufacturing-. Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 2020. 86. 1. 8-12
増井周造, 道畑正岐, 高増潔, 高橋哲. 階層型微細機能構造創製に関する研究(第2報):インプロセス干渉縞計測による多重干渉リソグラフィーの露光制御. 精密工学会学術講演会講演論文集. 2020. 2020. 0. 17-18
畚野剛瑠, 増井周造, 道畑正岐, 高増潔, 高橋哲. 階層型微細機能構造創製に関する研究(第1報):多重定在波照明露光構造の光学特性の理論解析. 精密工学会学術講演会講演論文集. 2020. 2020. 0. 3-4

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Patents (35)：

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Books (12)：

ナノ異物欠陥の高分解能・高感度・光学的計測法開発の最新動向
トライボロジスト, 2022, 67 巻, 11 号 2022
エバネッセント局在フォトンを用いたナノ造形技術の開発
光アライアンス2022年7月号 2022
精密工学会誌特集:微細領域の光学技術
公益社団法人精密工学会 2021
OplusE 2020年11・12月号(第476号)
2020
計量計測 Measureing Instruments はかる
2020

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Lectures and oral presentations (47)：

Challenge of advanced optical technology beyond the diffraction limit for nano/micro manufacturing
(【基調講演】CJUMP2023 : The CHINA-JAPAN International Conference on Ultra-Precision Machining Process 2023 2023)
Super Resolution Optical Measurement for Functional Microstructures beyond the Diffraction Limit
(【招待講演】ISMTII2023 2023)
先進的光制御で実現するナノ・マイクロ製造の最前線
(【基調講演】令和4年度近畿工業高等学校長協会研究協議会 2022)
回折限界以下の微細溝の光学的非破壊深さ計測
(【招待講演】第31回三次元工学シンポジウム「三次元工学の新潮流」 2021)
Challenge of nano optical technology beyond the diffraction limit for nano/micro manufacturing
(【招待講演】nanoMan2020: 7th International Conference on Nanomanufacturing 2021)

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Professional career (1)：

博士(工学) (大阪大学)

Work history (7)：

2023/04 - 現在 The University of Tokyo The Graduate School of Engineering
2014/04 - 2023/03 The University of Tokyo Research Center for Advanced Science and Technology
2013/06 - 2014/03 The University of Tokyo The Graduate School of Engineering
2003/01 - 2013/06 The University of Tokyo The Graduate School of Engineering
2011/05 - 2012/02 University of Toronto

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Committee career (19)：

2022/08 - 現在 ISNM(International Society for Nanomanufacturing) Fellow
2022/04 - 現在日本オプトメカトロニクス協会光センシング技術部会部会長
2021/02 - 現在 Journal of the International Societies for Precision Engineering and Nanotechnology Associate Editor
2019/12 - 現在 The European Society for Precision Engineering and Nanotechnology (euspen) National Heat Organiser (euspen talent programme)
2018/04 - 現在 International Journal of Precision Engineering and Manufacturing Editorial Board

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Awards (38)：

2023/11 - ASPEN2023 Best Paper Award A Novel Single-Microparticle Total Analysis System Driven by Optical Tweezers
2023/11 - ASPEN2023 Best Paper Award Fabrication of Functional Surface using Water Jet Guided Laser Processing: Characteristics of Surface Structuring by Underwater Processing
2023/09 - ISMTII2023 Best Paper Award In-process Observation of Physical Phenomena Inside the Workpiece Processed by Water Jet Guided Laser
2023/09 - ISMTII2023 Best Paper Award Super-resolution Imaging of Sub-diffraction-limited Pattern with Superlens based on Deep Learning
2022/11 - ASPEN2022 Best Paper Award

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Association Membership(s) (9)：

CIRP , european Society for Precision Engineering and Nanotechnology , American Society for Precision Engineering , THE JAPAN SOCIETY FOR ABRASIVE TECHNOLOGY , THE JAPAN SOCIETY OF MECHANICAL ENGINEERS , THE JAPAN SOCIETY FOR PRECISION ENGINEERING , 日本オプトメカトロニクス協会 , International Society for Nanomanufacturing , Asian Society for Precision Engineering and Nanotechnology

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