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J-GLOBAL ID:200902105462933426   Reference number:97A0632261

ArF Single Layer Resist Composed of Alicyclic Main Chain Containing Maleic Anhydride.

マレイン酸無水物を含む脂環式主鎖から成るArF単層レジスト
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Volume: 10  Issue:Page: 529-533  Publication year: 1997 
JST Material Number: L0202A  ISSN: 0914-9244  CODEN: JSTEEW  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Other reactions of polymer  ,  Manufacturing technology of solid-state devices 
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