Formation of Ni-Cr Films by Tri-Pole Magnetron Sputtering.
三磁極マグネトロンスパッタリング法によるNi-Cr合金薄膜の作製
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Volume:
50
Issue:
1
Page:
41-46
Publication year:
Jan. 1999
JST Material Number:
G0441B
ISSN:
0915-1869
CODEN:
HYGIEX
Document type:
Article
Article type:
原著論文
Country of issue:
Japan (JPN)
Language:
JAPANESE (JA)
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