3D Micro-Profile Measurement using Optical Inverse Scattering Phase Method.

TAGUCHI A; MIYOSHI T; TAKAYA Y; TAKAHASHI S; SAITO K

Art

J-GLOBAL ID：200902107106129089 Reference number：00A0863188

3D Micro-Profile Measurement using Optical Inverse Scattering Phase Method.

光学的逆散乱位相法を用いた3D微小プロファイル測定

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Material：
Volume： 49 Issue： 1 Page： 423-426 Publication year： 2000
JST Material Number： E0026A ISSN： 0007-8506 Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Measuring methods and instruments of length,area,cross section,volume,angle

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