Direct Patterning of Rotary Encoder Grating on the Metallic Shaft with YAG Laser Marker.

ONDA HAJIME; UCHIYAMA NAOYUKI; TAKAHASHI TOORU; MIZUTANI MASATOSHI

Art

J-GLOBAL ID：200902115608075406 Reference number：00A0759111

Direct Patterning of Rotary Encoder Grating on the Metallic Shaft with YAG Laser Marker.

YAGレーザマーカによる金属表面直接描画光エンコーダ

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Material：
Volume： 66 Issue： 8 Page： 1256-1259 Publication year： Aug. 05, 2000
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Manufacturing technology of solid-state devices

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