Preparation of La-Mn Complex Oxide Films Using Radio Frequency Magnetron Sputtering and Oxygen Sensor Characteristics.

YAMADA SATOSHI; HORI SHIGENORI; MATSUMOTO YASUMICHI; KURATOMI JUN'ICHI; HOMBOU JUKICHI; SHIRAKASHI TAKASHI; YOSHIHARA SACHIO; NENNO SOJI; SATO EIICHI

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J-GLOBAL ID：200902115787121512 Reference number：95A0269453

Preparation of La-Mn Complex Oxide Films Using Radio Frequency Magnetron Sputtering and Oxygen Sensor Characteristics.

高周波マグネトロンスパッタリング法を用いたLa-Mn複合酸化物薄膜の作製と酸素センサ特性

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Volume： 63 Issue： 3 Page： 205-211 Publication year： Mar. 1995
JST Material Number： G0072A ISSN： 1344-3542 CODEN： EECTFA Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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